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制冷机低温泵的冷源是小型制冷机。The condensation source of the modern cryopump is a mini refrigerator.
本文从溅射镀膜的要求出发,设计出符合溅射镀膜要求的ZDB—200低温泵。In this paper, the cryopump type ZDB-200 for sputtering coater is designed.
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低温泵的冷源是小型气体制冷机。The mini-refrigerator is used as the condensation source of the modem cryopump.
本文叙述了低温泵在超导磁镜装置中的应用。In this paper, a cryopump applyed to the superconducting magnetic mirror machine is described.
分析了液氦低温板的凝结层对低温泵性能的影响。The effects of the condensing layer of the cryopanel on the cryopump capabilities were analyzed.
目前已完成低温泵的中试生产,开始批量生产。At present , the pilot production of cryopump has been finished, the batch production will begin soon.
并为以后开发更大抽速的低温泵及相关应用积累了丰富的物理参数和经验。Physical parameters and experience were obtained which is very useful in developing even larger cryopump.
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在分析低温抽气机理的基础上,提出了ZDB—200型制冷机低温泵的主要参量。The main parameters of refrigerating cryopump type ZDB-200 are given according to analysis on the cryogenic pumping mechanism.
采用铑铁电阻温度传感器研制了一台低温温度计,用于对制冷机低温泵温度的测控。A smart cryomatic instrument has developed to measure and control the temperature of a refrigerator cooled cryopump by means of the Rh Fe resistance sensor.
文章介绍了制冷机低温泵的工作原理、结构和特点,以及在国外空间环境模拟设备上的使用情况。The theory, main structure and characteristics of the cryopump are introduced, together with its applications in the space environment simulators in foreign countries.
为进一步研究液氦温区低温吸附抽气性能、设计研制NBI用液氦低温吸附泵提供了理论依据。It provided a theoretical basis for further research about the cryoadsorption in the interzone temperature of liquid helium and designing and developing a cryopump used in NBI.
小型全封闭式氦气压缩机是G-M制冷机的配套设备,广泛应用于空间环模设备、真空低温泵、真空镀膜等。Small totally enclosed helium compressor is a componend equipment of G-M refrigerator. It is widely used in space environment simulation equipments, vacuum cryopump and vacuum coating equipments etc.