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讨论了自聚焦平面微透镜阵列的制作工艺及其基本特性。The fabrication and characterization of gradient index planar microlens array is discussed.
此即,每一光电二极体PDL与PDS都会接收到面积相同之微透镜元件710-A传来的光线。That is, each PDL and PDS receives light from a microlens element 710-A having the same area.
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介绍了采用光刻离子交换工艺制作平面交叉型微透镜阵列的方法。In the paper, ion-exchange technique fabrication method of planar intersect microlens arrays is given.
通过反应离子刻蚀可以将光刻胶微透镜图形转移至这种高性能的聚合物材料上。Pattern transfer technique is used to transfer photoresist microlens arrays into the polymer underlayer.
图像写入装置,光源,光源单元,微透镜以及微透镜的制造方法。Image load in device, light source, light source element, microlens and manufacturing method of microlens.
介绍了利用光刻胶热熔法制作微透镜阵列这种简单、实用的技术。The technique of fabrication of microlens array by means of melting photoresist is introduced in this paper.
提出微透镜阵列与转镜相结合的大口径激光光束扫描方法。A large aperture laser beam scanning method by combining microlens arrays with rotating mirror is put forward.
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本文的研究结果可为微透镜阵列的进一步研制及产业化提供参考。The results of this paper could provide references for the further study of microlens array and its industrialization.
本文提出了利用全息再现的方法来制作全息微透镜列阵。In this paper, we develop a new method for fabricating holographic microlens array based on holographic reconstruction.
特别设计了微透镜阵列与针孔阵列对准粘接的机械和观察系统。The mechanics and the observing system for aligning and bonding microlens arrays with pinhole arrays are specially designed.
提出一种以重铬酸铵明胶作为记录材料,用编码灰阶掩模曝光,蛋白酶溶液作为显影剂制作折射型微透镜阵列的新方法。The microlens array was made of bichromate gelatine, exposed by coding gray tone mask and developed by protein enzyme solution.
结果表明,光刻胶热熔技术是一种简单、实用的微透镜阵列制作技术。The results show that the technology of melting photoresist is a simple and practical technology of fabricating microlens array.
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根据重铬酸铵明胶在受光照后发生交联的原理,采用重铬酸铵明胶作材料制作了微透镜阵列。Using the reaction of the crosslinking of ammonium dichromate gelatin after irradiation, a novel microlens array was fabricated.
它通过一个被称为微光线阵列的特殊传感器来实现这一行为,微光线传感器将大量光线等价地装入一个很小的空间。It accomplishes that with a special sensor called a microlens array, which puts the equivalent of many lenses into a small space.
包括折射微透镜的几何光学设计方法和衍射微透镜的衍射光学设计理论。It includes the geometrical optics design theory for refractive microlens and diffraction optics theory for diffractive microlens.
文中给出了用激光直写设备在曲面基底上进行光刻来制作曲面微透镜阵列的方法。The lithography technique to fabricate the curved microlens array on the curved substrate by using laser direct writing system was also given.
此外,本文还分析了制作误差等因素对微透镜阵列衍射效率的影响,对系统中的光能损失进行了分析。Furthermore, the effect of fabrication-related errors on the diffractive microlens array and the optical losses in the system are also studied.
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实验获得了微透镜列阵与红外焦平面集成芯片,并在热成像中取得了良好的结果。The microlens array and IR focal plane integrated chips are obtained in experiments. These chips have achieved good results in thermal imaging.
本文分析了离焦量对微透镜列阵成像光刻图形质量的影响,给出了系统离焦量的容差。Defocusing effect on the patterns of microlens array imaging photolithography is analyzed, and tolerance of defocusing range of the system is given.
并利用ZEMAX软件对微透镜列阵进行仿真,基于惠更斯子波直接积分的算法计算得到了微透镜列阵焦平面上的光场强度分布。Moreover, simulation of microlens array is carried out by ZEMAX software, and the distribution of optical intensity on the focal plane is calculated.