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介绍了准分子激光微加工的机理、特点和应用。Mechanism, characteristic and application of excimer laser micromachining are introduced.

采用微加工工艺制备出一种聚合物微锥阵列。A fabrication process has been developed to form a polymer micro tip arrays using micromachining.

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目的建立微流控芯片的CO_2激光直接微加工方法。Objective To establish direct-write laser method for micromachining immunoassay microfluidic chip.

设计了一种基于体微机械加工技术的新型音叉式微机械陀螺。A novel tuning fork micromachined gyroscope, based on bulk micromachining technology, is presented.

利用微加工技术，我们还将微加热器和温度传感器集成到本芯片上。Using micromachining technology, we also integrated micro-heater and temperature sensor on the chip.

提出用发展中的硅微机械加工技术设计制作硅一体化薄膜微电极器件。A silicon integrated thin-film microelectrode device was developed by using silicon micromachining techniques.

讨论利用微机械加工技术制作传感器的可能性、必然性。This paper examines the possibility and necessity of using micromachining technology for sensor manufacturing.

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应用体硅微机械加工技术，制作了一种双端固定音叉式谐振器。A double-ended tuning fork resonator is presented, which is fabricated by silicon bulk micromachining technology.

采用体微机械加工技术和硅硅键合技术可以实现高性能的加速度传感器。Using bulk micromachining and silicon bonding we can achieve high-performance full-silicon sandwich accelerometer.

厚层抗蚀剂光刻是一种制作深浮雕结构的微细加工技术。Thick resist lithography is one kind of micromachining techniques fabricating relief microstructures at great depth.

随着硅表面微机械技术的发展，使得许多微机械器件的制作成为可能。Recent development of silicon micromachining technology has made possible the fabrication of many micromechanical devices.

传感器性能的测试结果表明了微机械加工对提高传感器性能的重要性。The measuring results of the above sensors indicate that the micromachining is very important to improve their performances.

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采用了光刻、电镀、溅射等微细加工工艺制造了MGELR的定子。The micromachining process like photolithograph, electroplate and sputtering etc is adopted to fabricate the stator of MGELR.

给出基于硅微加工技术的一种新型可变形反射镜的设计和加工方法。The design and fabrication of a novel deformable mirror based on silicon micromachining technology was presented in this paper.

在生产领域，激光可以用来钻孔、切割、连接、硬化以及进行表面改性和微加工。In the area of manufacturing, lasers are used for drilling, cutting, joining, hardening, surface modification and micromachining.

文中介绍硅微机械谐振真空传感器的特点及配套研制的真空计。This paper presents the characteristics of silicon micromachining resonance vacuum sensor and a vacuum meter utilizing this sensor.

微结构气敏传感器是利用微电子、微机械和薄膜等技术制作的新一代气敏元件。The micro gas sensor is a device of new generation, which is made through microelectronic , micromachining and thin film technologies.

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阵列单元的绝热结构设计以及器件的微细加工工艺是研制电阻阵列红外场景产生器的核心问题。The pixel thermal-isolate structure design and the device micromachining processes are the core issues of the resistor array DIRSP devices.

详细讨论了双岛结构多晶硅压力传感器制作过程中的一种微机械加工技术。This paper mainly discusses a micromachining technology used during the fabrication of the twin isle structure polysilicon pressure sensor.

基于体硅微加工技术设计并制作了一种新型的采用静电驱动的连续面型可变形反射镜。A novel electrostatic actuated deformable mirror with continuous facet is designed and fabricated by using silicon bulk micromachining technology.